Design and maskless fabrication of ultrathin suspended membranes of GaN
Identifieur interne : 005700 ( Main/Exploration ); précédent : 005699; suivant : 005701Design and maskless fabrication of ultrathin suspended membranes of GaN
Auteurs : I. M. Tiginyanu [Moldavie] ; V. Popa ; M. A. Stevens-Kalceff [Australie] ; D. Gerthsen [Allemagne] ; P. Brenner [Allemagne] ; D. Pavlidis [France]Source :
- physica status solidi (RRL) – Rapid Research Letters [ 1862-6254 ] ; 2012-04.
Descripteurs français
- Wicri :
- topic : Moldova.
English descriptors
- KwdEn :
- Beam treatment, Bottom surface, Chemical inertness, Electrolyte, Etching, Gmbh, Kgaa, Lett, Maskless, Maskless fabrication, Membrane, Mesastructure, Moldova, Nanosheets, Nanostructures, Photoelectrochemical, Phys, Popa, Rectangular area, Sample surface, Spatial architecture, Spatial distribution, Status solidi, Surface regions, Technological approach, Tiginyanu, Ultrathin, Ultrathin membrane, Verlag, Verlag gmbh, Weinheim, Yellow luminescence.
- Teeft :
- Beam treatment, Bottom surface, Chemical inertness, Electrolyte, Etching, Gmbh, Kgaa, Lett, Maskless, Maskless fabrication, Membrane, Mesastructure, Moldova, Nanosheets, Nanostructures, Photoelectrochemical, Phys, Popa, Rectangular area, Sample surface, Spatial architecture, Spatial distribution, Status solidi, Surface regions, Technological approach, Tiginyanu, Ultrathin, Ultrathin membrane, Verlag, Verlag gmbh, Weinheim, Yellow luminescence.
Abstract
We report the maskless fabrication of ultrathin suspended GaN membranes designed by focused ion beam treatment of the GaN epilayer surface with subsequent photoelectrochemical etching. This technological approach allows the fabrication of ultrathin membranes, as well as supporting micro/nanocolumns in a controlled fashion. The analysis of the spatial and spectral distribution of microcathodoluminescence demonstrates that the membranes exhibit mainly yellow luminescence. These results pave the way for the fabrication of ultrathin suspended GaN membranes for MEMS/NEMS applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Url:
DOI: 10.1002/pssr.201206020
Affiliations:
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